CMOS技术中的集成化学微传感系统

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CMOS技术中的集成化学微传感系统

CMOS技术中的集成化学微传感系统

（美）海尔莱曼（Hierlemann，A.）编著

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Tahun:

2007

Penerbit:

北京：科学出版社

Bahasa:

chinese

Halaman:

229

ISBN:

40202085

Fail:

PDF, 30.62 MB

IPFS:

,

chinese, 2007

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Penukaran menjadi gagal

Mungkin anda berminat

Humberto Campanella — Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

R. Jaeger [non-OCR] — Introduction to Microelectronic Fabrication

MKS Instruments — MKS Instruments Handbook Semiconductor Devices and Process Technology

Reza Ghodssi, Pinyen Lin — MEMS Materials and Processes Handbook

Gregory T.A. — Kovacs. Micromachined Transducers. Sourcebook

Wolfgang Menz, Jürgen Mohr, Oliver Paul — Microsystem Technology

2014 — MEMS cost analysis from laboratory to industry

Gopel W. (ed.), Hesse J. (ed), Zemel J. N. (ed.) — Sansors

Gregory T.A. Kovacs — Micromachined Transducers Sourcebook

Raivo Jaaniso; Ooi Kiang Tan — Semiconductor Gas Sensors

Michael Quirk, Julian Serda — Semiconductor Manufacturing Technology

Stephen A. Campbell — Fabrication Engineering at the Micro- and Nanoscale

Tina L. Lamers, Beth L. Pruitt (auth.), Reza Ghodssi, Pinyen Lin (eds.) — MEMS Materials and Processes Handbook

T. Fukuda, Wolfgang Menz — Micro Mechanical Systems: Principles and Technology

Sami Franssila — Introduction to Microfabrication

Sami Franssila — Introduction to Microfabrication

Simon M. Sze — Fundamentals of Semiconductor Fabrication

Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim — Microsensors, MEMS, and smart devices

W. Trimmer, Institute of Electrical and Electronics Engineers — Micromechanics and MEMS: classic and seminal papers to 1990

Jan Korvink, Oliver Haber — MEMS: A Practical Guide to Design, Analysis, and Applications

Mohamed Gad-el-Hak — The MEMS Handbook

Madou, Marc J — Fundamentals of microfabrication: the science of miniturization

Mohamed Gad-el-Hak — The MEMS Handbook MEMS Design

Ravio Jaaniso, Ooi Kiang Tan — Semiconductor gas sensors

Randy Frank — Understanding Smart Sensors

Kumar Shubham, Ankaj Gupta — Integrated Circuit Fabrication

Ellis Meng — Biomedical microsystems

Roy, Sunipa; Sarkar, Chandan Kumar — MEMS and nanotechnology for gas sensors

Nadim Maluf, Kirt Williams — Introduction to microelectromechanical systems engineering

Lynn Khine, Julius M. Tsai (Eds.) — NEMS/MEMS Technology and Devices

— Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2

— enabling technologies for mems and nanodevices

Masayoshi Esashi — 3D and Circuit Integration of MEMS

Oliver Paul (auth.), Jan G. Korvink, Oliver Paul (eds.) — MEMS: A Practical Guide to Design, Analysis, and Applications

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